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Published Article / I07/1997/I-304 ENY-ARTICLE-2008-065

Properties of corona charged plasma vapour deposited PTFE film

Kacprzyk, R ; Ziaja, J


Abstract: Properties characterising charge storage in submicron polytetrafluoroethylene (PTFE) layer deposited by evaporation in a radio-frequency (RF) plasma are described in this paper. X-ray diffraction (XRD) and scanning electron microscopy (SEM) investigations have shown that the method allows to deposit amorphous and uniform dielectric layers exhibiting resistivity at room temperature in the order of 10E14 Om. Electrical conductivity and thermo- stimulated discharge current (TSD) results were measured in the temperature range 300-450K while an isothermal discharge characteristic was examined at room temperature.

Keyword(s): corona charged plasma ; PTFE film
Note: Journal of Electrostatics. 1997 vol. 40/41, s. 319-323

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Cited by: try citation search for ENY-ARTICLE-2008-065; I07/1997/I-304

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